A project to study quasi-LIGA design and the associated applications, undertaken by Shanghai Jiaotong University, has recently landed substantive progresses. The three new techniques with multi-level 3D microstructures have produced filature nozzles built in three-level microstructures, with a thickness larger than 1.4mm. Researchers defined the application ranges of the three techniques, after an intercomparison of the strength and weakness. They produced filature nozzles, double-deck nickel minigear moulds, and integrated probers, using quasi-LIGA multi-level 3D microstructures processing techniques. They also rolled out Fresnel lens and FOA, using quasi-LIGA mobile microstructures technique.
The project has resulted in 2 national invention patents, and published 6 papers. In addition, researchers involved in the development of MEMS components for a number of domestic enterprises, using quasi-LIGA technology. Considering the fact that MEMS switch is a promising micro-implement, researchers have worked on the design, processing and performance test of MEMS switch and the associated components. They also optimized the shape and geometric parameters of mini springs in the switch, using finite element analysis software, and developed a unit able to test the dynamic performance of mini springs.
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